Workshops - with various session topics and invited speakers

GEC 2022 Workshops - Monday, October 3, 2022

Industrial plasma technologies

• Moriya, Tsuyoshi : Tokyo Electron Limited, Japan
  New challenges on semiconductor plasma manufacturing

• Kim, Jaeho: Samsung Electronics, Korea
  Applications of plasma-enhanced deposition technologies in the semiconductor industry

• Lee, Dae Hoon: Korea Institute of Machinery and Materials, Korea
  Plasma for a clean and carbon-neutral world

• Kenney, Jason: Applied Materials, USA
  Modeling and simulation of plasmas for etch applications

• Ohtake, Hiroto: Hitachi High Technologies America, USA
  Thermal cyclic atomic-level etching in 3D ULSI device fabrication

• Tatsumi, Tetsuya: Sony Semiconductor Solutions Corporation, Japan
  Quantitative control of plasma and surface reactions for dielectric film etching

Plasma physics for space propulsion technologies

• Boswell, Rod: Boswell Technologies, Australia
  From laboratory to orbit: Mothballs in Space

• Merino, Mario: Universidad Carlos III de Madrid, Spain
  Electrodeless plasma thrusters and magnetized plasma expansions for space propulsion

• Little, Justin: University of Washington, USA
  Magnetically expanding plasmas for space propulsion

• Fruchtman, Amnon: Holon Institute of Technology, Israel
  The effects of collisions and oscillating fields on the thrust in electric propulsion

• Mazouffre, Stéphane: CNRS - ICARE laboratory, France
  Electron thermodynamics and ion transport in the magnetic nozzle of electrodeless electric thrusters

• Kawashima, Rei: Shibaura Institute of Technology, Japan
  Anatomy of cross-field electron transport by steady and unsteady plasma structures in Hall thrusters

• Cho, Shinatora: Japan Aerospace Exploration Agency, Japan
  In-space electric propulsion system enabling JAXA commercial removal of debris demonstration (CRD2): Challenges and relevant physics

Functional surfaces in plasma elementary and process-applicable reactions

• Kurahashi, Mitsunori: National Institute for Material Science, Japan
  Application of hyperthermal spin- and alignment-controlled O2 beam to surface reaction analysis

• Nakamura, Hiroaki: National Institute for Fusion Science, Japan
  Integrated simulation for excited hydrogen molecule formed by recombination on carbon surfaces

• Ibano, Kenzo: Osaka University, Japan
  Fibrous nanostructures formation using helium plasma and their applications as functional materials

• Nozaki, Tomohiro: Tokyo Institute of Technology, Japan
  Gas reforming by plasma-catalyst coupling

• Kim, June Young : Seoul National University, Korea
  Kinetic simulation of narrow gap discharge

• Stamate, Eugen: Technical University of Denmark, Denmark
  Advanced functional thin films for energy conversion and storage devices deposited by plasma-based processes

Catalytic effects in plasma-liquid interaction

• Zhou, Renwu: University of Sydney, Australia
  Cold atmospheric plasma bubbles: Reactive environments for sustainable processing and activation

• Murakami, Tomoyuki: Seikei University, Japan
  Graph-based approach to catalytic effects in plasma-exposed liquids

• Shimizu, Naohiro: Nagoya University, Japan
  Water dessociation by high-power pulse plasma

• Bogaerts, Annemie: University of Antwerp, Belgium
  Modeling of plasma-liquid interaction