Will Allis Prize Recipient: Professor Vincent M. Donnelly
Vincent M. Donnelly
William A. Brookshire Department of Chemical and Biomolecular Engineering, University of Houston
Presentation title: Looking for plasma diagnostic techniques in unusual places
Citation: “For sustained, pioneering research elucidating fundamental physical and chemical mechanisms of plasma etching of microelectronic materials, enabled by the invention of novel plasma and plasma-surface diagnostics, including advanced optical spectroscopy and the 'spinning wall' method.”
The GEC Executive Committee is pleased to recognize Professor Vincent M. Donnelly as the recipient of the 2024 Will Allis Prize for the Study of Ionized Gases.
The prize was established in 1989 by contributions from American Telephone and Telegraph, General Electric, General Telephone and Electronics, International Business Machines, and Xerox Corporations in recognition of the outstanding contributions of Will Allis to the study of ionized gases.
